Typical Applications:
- Heat treating, cutting and other thermal processes for mass flow sensors
- Semiconductor and LED production tools
- Thin film deposition systems
- Biopharmaceutical bioreactors
- Petrochemical and chemical gas and liquid pilot plants
- Purge gas, process analysis and analytical flow measurement
Elastometer Sealed Mass Flow Controllers & Meters
- Widest flow and pressure ranges
- Long-term stability delivers sustained value
- Includes products approved for hazardous areas
- Hose down/wash down device enclosures
Specification:
- Fluid Type: Gas
- Flow Range (Full Scale Capacity):
3sccm – 2500 lpm - Accuracy: ± 0.6% of SP
- Max Pressure: 4500 psig
- Temperature: 65oC
- Output Type: Analog & Digital
Coriolis Mass Flow Controllers
- Highest accuracy for very low-flow processes
- Multi-variable device provides flow, density and temperature.
- Devices for both liquid and gas applications
Specification:
- Fluid Type: Gas, Liquids
- Flow Range (Full Scale Capacity):
10 – 27,000 gram/hr - Accuracy: 0.2% – 0.5% of Rate
- Max Pressure: 4500 psig
- Temperature: 65oC
- Output Type: Analog & Digital
Metal Sealed Mass Flow Controllers & Meters
- For processes sensitive to moisture or oxygen.
- High purity flow path minimizes process contamination, enhances yield.
- Ultrafast response time.
Specification:
- Fluid Type: Gas
- Flow Range (Full Scale Capacity):
3sccm – 300 lpm - Accuracy: SP ±1%
- Max Pressure: 150 psig
- Temperature: 50oC
- Output Type: Analog & Digital
High Temperature Mass Flow Controllers
- Highest operating temperature
- High accuracy and repeatability
- Ultra-high purity construction
- Fluid Type: Gas, Vapor
- Flow Range (Full Scale Capacity):
3sccm – 300 lpm - Accuracy: SP ±1%
- Max Pressure: 140 psig
- Temperature: 105oC
- Output Type: Analog & Digital
